Lurie Nanofabrication Facility,
EECS Building, University of Michigan North Campus
This is a 4-day accelerated training program for external (non-U-M) engineers and researchers, that will allow all attendees to become users at the Lurie Nanofabrication Facility (LNF). During this program, you will master safe lab protocols, get exposure to fabrication and characterization steps applicable to many research projects, and receive in depth lectures about the technologies and processes that are available in the LNF. Each session will be limited to 8-10 people to ensure that group sizes are small, and thus maximize the experience of the participants.
Attendees will build a small microfluidic PCR reactor device, and understand how to apply design principles to other devices. This is an ideal introduction to the clean room experience and the vast nano and micro manufacturing world.
Registration is required at least one week prior to the sessions start date and requires a $100 non-refundable deposit. Please Note: Before attendees can begin any of the sessions they will need to complete the “Getting Access” steps on our web page.
The Smart Start total fees will be based on the LNF daily access and entry fees, for reference we estimate the totals to be within the following ranges:
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| Tuesday |
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| Wednesday |
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| Thursday |
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PROCESS OVERVIEW
- Tuesday: Fabricate micro heater using lithography, e-beam evaporation, and liftoff techniques
- Wednesday: Isolate heater from substrate using backside lithography and deep reactive ion etching (DRIE).
- Thursday: Create a PDMS reactor using an SU-8 mold. Bond reactor to the silicon substrate.
SESSION DATES
| Session 1 | June 18-21 2012 |
| Session 2 | July 9-12 2012 |
Accommodation at 2 bedroom suites in Baits student dormitories (walking distance to the LNF) has been arranged, based on Sunday arrival and Thursday or Friday departure. The rates are $43 per night for each room or $23/per person, per night if sharing a two bed room. I.e. Each suite is $86/ night. Please confirm if accommodation will be required.
This course is open to any external (non-U-M) engineers and researchers interested in learning more about micro/nanofabrication techniques. Due to space limitations, it is not open to current users of the LNF.
Please send an email to LNF-info@umich.edu to show your interest and get added to the circulation list for future data updates.
Space is limited, so please register as soon as possible.
Thank you,
The staff at the LNF
